Masashi Imanaka

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma film-forming apparatus and substrate pedestal
- Patent number 10,968,513
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Masashi Imanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma film-forming method and plasma film-forming apparatus
- Patent number 10,190,217
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Minoru Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND CEILING WALL
- Publication number 20230343561
- Publication date Oct 26, 2023
- TOKYO ELECTRON LIMITED
- Satoshi ITOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20230085325
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Hirokazu KYOKANE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PLASMA FILM-FORMING APPARATUS AND SUBSTRATE PEDESTAL
- Publication number 20170369996
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Masashi Imanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA FILM-FORMING METHOD AND PLASMA FILM-FORMING APPARATUS
- Publication number 20170370000
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Minoru Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...