Masashi KABASAWA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing method and polishing apparatus
- Patent number 12,076,830
- Issue date Sep 3, 2024
- Ebara Corporation
- Masashi Kabasawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,897,080
- Issue date Feb 13, 2024
- Ebara Corporation
- Masashi Kabasawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 11,642,751
- Issue date May 9, 2023
- Ebara Corporation
- Masashi Kabasawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING METHOD, COMPUTER-READABLE STORAGE MEDIUM STORING PROGRAM...
- Publication number 20240359290
- Publication date Oct 31, 2024
- EBARA CORPORATION
- Keita YAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE PROCESSING APPARATUS, METH...
- Publication number 20240217062
- Publication date Jul 4, 2024
- EBARA CORPORATION
- Masashi KABASAWA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD,...
- Publication number 20240217060
- Publication date Jul 4, 2024
- EBARA CORPORATION
- Masashi KABASAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD, AND POLISHING APPARATUS
- Publication number 20240181594
- Publication date Jun 6, 2024
- EBARA CORPORATION
- Masashi KABASAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20230219187
- Publication date Jul 13, 2023
- EBARA CORPORATION
- Masashi KABASAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20210114164
- Publication date Apr 22, 2021
- EBARA CORPORATION
- Masashi KABASAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20200391342
- Publication date Dec 17, 2020
- EBARA CORPORATION
- Masashi KABASAWA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF REGULATING A SURFACE TEMPERATURE OF POLISHING PAD, AND PO...
- Publication number 20190308293
- Publication date Oct 10, 2019
- EBARA CORPORATION
- Keisuke Kamiki
- B24 - GRINDING POLISHING
Information Patent Application
HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF P...
- Publication number 20190126428
- Publication date May 2, 2019
- EBARA CORPORATION
- Toru MARUYAMA
- F28 - HEAT EXCHANGE IN GENERAL

Masashi KABASAWA

Person

Patents Grantslast 30 patents

Polishing method and polishing apparatus

Polishing apparatus

Polishing method and polishing apparatus

Patents Applicationslast 30 patents

POLISHING METHOD, COMPUTER-READABLE STORAGE MEDIUM STORING PROGRAM...

SUBSTRATE POLISHING APPARATUS, SUBSTRATE PROCESSING APPARATUS, METH...

SUBSTRATE POLISHING DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD,...

POLISHING METHOD, AND POLISHING APPARATUS

POLISHING METHOD AND POLISHING APPARATUS

POLISHING APPARATUS

POLISHING METHOD AND POLISHING APPARATUS

METHOD OF REGULATING A SURFACE TEMPERATURE OF POLISHING PAD, AND PO...

HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF P...