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Masashi MATSUMOTO
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Nirasaki-shi, Yamanashi, JP
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last 30 patents
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Patent Grant
Etching method
Patent number
9,691,630
Issue date
Jun 27, 2017
Tokyo Electron Limited
Nobuhiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ETCHING METHOD
Publication number
20160086814
Publication date
Mar 24, 2016
TOKYO ELECTRON LIMITED
Nobuhiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS