Masashi Mizuta

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for washing semiconductor manufacturing apparatus component,...
- Patent number 10,741,380
- Issue date Aug 11, 2020
- Furukawa Co., Ltd.
- Masashi Mizuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition apparatus and method associated
- Patent number 9,273,396
- Issue date Mar 1, 2016
- Furukawa Co., Ltd.
- Masashi Mizuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR WASHING SEMICONDUCTOR MANUFACTURING APPARATUS COMPONENT,...
- Publication number 20190122880
- Publication date Apr 25, 2019
- Furukawa Co., Ltd.
- Masashi Mizuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS AND METHOD ASSOCIATED
- Publication number 20150275371
- Publication date Oct 1, 2015
- Furukawa Co., Ltd.
- Masashi Mizuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR WASHING SEMICONDUCTOR MANUFACTURING APPARATUS COMPONENT,...
- Publication number 20140144381
- Publication date May 29, 2014
- Furukawa Co., Ltd.
- Masashi Mizuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...