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Masashi Nakagome
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Yokohama, JP
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last 30 patents
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Patent Grant
Vacuum processing apparatus
Patent number
8,048,259
Issue date
Nov 1, 2011
Hitachi High-Technologies Corporation
Michiaki Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Vacuum processing apparatus
Publication number
20070068626
Publication date
Mar 29, 2007
Michiaki Kobayashi
H01 - BASIC ELECTRIC ELEMENTS