Masashi TSUCHIYAMA

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,971,661
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,869,789
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,664,254
- Issue date May 30, 2023
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,211,278
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Akihiro Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and coating and developing method
- Patent number 11,199,785
- Issue date Dec 14, 2021
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and coating and developing method
- Patent number 11,079,691
- Issue date Aug 3, 2021
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and coating and developing method
- Patent number 10,838,311
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Keigo Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240231232
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240079256
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
- Publication number 20240036482
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Masashi TSUCHIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230106927
- Publication date Apr 6, 2023
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220165597
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220165596
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210278768
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Yoji Sakata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD
- Publication number 20210103224
- Publication date Apr 8, 2021
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD
- Publication number 20210103225
- Publication date Apr 8, 2021
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20200126823
- Publication date Apr 23, 2020
- TOKYO ELECTRON LIMITED
- Akihiro TERAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD
- Publication number 20200110343
- Publication date Apr 9, 2020
- TOKYO ELECTRON LIMITED
- Keigo Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Masashi TSUCHIYAMA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Coating and developing apparatus and coating and developing method

Coating and developing apparatus and coating and developing method

Coating and developing apparatus and coating and developing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD

COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD

Substrate Processing Apparatus and Substrate Processing Method

COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD