Masashi Yamaguchi

Person

  • Nirasaki-shi, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    JIG, PROCESSING SYSTEM AND PROCESSING METHOD

    • Publication number 20210166960
    • Publication date Jun 3, 2021
    • TOKYO ELECTRON LIMITED
    • Kippei SUGITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method and apparatus for etching Si

    • Publication number 20060021704
    • Publication date Feb 2, 2006
    • TOKYO ELECTRON LIMITED
    • Yoshitaka Saita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method and apparatus for etching Si

    • Publication number 20040048487
    • Publication date Mar 11, 2004
    • TOKYO ELECTRON LIMITED
    • Yoshitaka Saita
    • H01 - BASIC ELECTRIC ELEMENTS