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Masashi Yamaguchi
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Nirasaki-shi, JP
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last 30 patents
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Patent Grant
Method and apparatus for etching Si
Patent number
6,972,264
Issue date
Dec 6, 2005
Tokyo Electron Limited
Yoshitaka Saita
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
JIG, PROCESSING SYSTEM AND PROCESSING METHOD
Publication number
20210166960
Publication date
Jun 3, 2021
TOKYO ELECTRON LIMITED
Kippei SUGITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Method and apparatus for etching Si
Publication number
20060021704
Publication date
Feb 2, 2006
TOKYO ELECTRON LIMITED
Yoshitaka Saita
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method and apparatus for etching Si
Publication number
20040048487
Publication date
Mar 11, 2004
TOKYO ELECTRON LIMITED
Yoshitaka Saita
H01 - BASIC ELECTRIC ELEMENTS