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Masasuke Matsudai
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Kanagawa, JP
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last 30 patents
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Patent Grant
Sputter source, sputtering device, and sputtering method
Patent number
7,347,919
Issue date
Mar 25, 2008
Ulvac, Inc.
Shigemitsu Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Sputter source, sputtering device, and sputtering method
Publication number
20040231973
Publication date
Nov 25, 2004
ULVAC, Inc.
Shigemitsu Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...