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Masataka Sakai
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Kumamoto, JP
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last 30 patents
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Patent Grant
Stage apparatus and coating treatment device
Patent number
7,874,261
Issue date
Jan 25, 2011
Tokyo Electron Limited
Tsuyoshi Yamasaki
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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last 30 patents
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Patent Application
STAGE APPARATUS AND COATING TREATMENT DEVICE
Publication number
20090013927
Publication date
Jan 15, 2009
TOKYO ELECTRON LIMITED
Tsuyoshi Yamasaki
H01 - BASIC ELECTRIC ELEMENTS