Masataka Sakai

Person

  • Kumamoto, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Stage apparatus and coating treatment device

    • Patent number 7,874,261
    • Issue date Jan 25, 2011
    • Tokyo Electron Limited
    • Tsuyoshi Yamasaki
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents