Masataka Toiya

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method, film formation apparatus, and method for usi...
- Patent number 8,338,312
- Issue date Dec 25, 2012
- Tokyo Electron Limited
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Direct oxidation method for semiconductor process
- Patent number 8,153,534
- Issue date Apr 10, 2012
- Tokyo Electron Limited
- Hisashi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process tube for manufacturing semiconductor wafers
- Patent number D594488
- Issue date Jun 16, 2009
- Tokyo Electron Limited
- Masataka Toiya
- D15 - Machines not elsewhere specified

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD, FILM FORMATION APPARATUS, AND METHOD FOR USI...
- Publication number 20110201210
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECT OXIDATION METHOD FOR SEMICONDUCTOR PROCESS
- Publication number 20110129604
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Hisashi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oxidation apparatus and method for semiconductor process
- Publication number 20080075838
- Publication date Mar 27, 2008
- Hisashi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...