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Masatake Yoneda

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Liquid processing apparatus, liquid processing method, and recordin...
    • Patent number 9,202,731
    • Issue date Dec 1, 2015
    • Tokyo Electron Limited
    • Shigeru Kasai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Annealing apparatus
    • Patent number 8,897,631
    • Issue date Nov 25, 2014
    • Tokyo Electron Limited
    • Shigeru Kasai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Annealing device
    • Patent number 8,440,939
    • Issue date May 14, 2013
    • Tokyo Electron Limited
    • Shigeru Kasai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Annealing apparatus
    • Patent number 8,246,900
    • Issue date Aug 21, 2012
    • Tokyo Electron Limited
    • Shigeru Kasai
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Grant

    Processing equipment for object to be processed
    • Patent number 8,110,045
    • Issue date Feb 7, 2012
    • Tokyo Electron Limited
    • Masatake Yoneda
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Heat treatment apparatus, computer program, and storage medium
    • Patent number 8,107,801
    • Issue date Jan 31, 2012
    • Tokyo Electron Limited
    • Masahiro Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Thermal processing apparatus
    • Patent number 7,978,963
    • Issue date Jul 12, 2011
    • Tokyo Electron Limited
    • Masahiro Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing equipment for object to be processed
    • Patent number 7,846,255
    • Issue date Dec 7, 2010
    • Tokyo Electron Limited
    • Masatake Yoneda
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Shower head structure and cleaning method thereof
    • Patent number 6,905,079
    • Issue date Jun 14, 2005
    • Tokyo Electron Limited
    • Tomonao Kuwada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming device
    • Patent number 6,733,593
    • Issue date May 11, 2004
    • Tokyo Electron Limited
    • Sumi Tanaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    HEATING APPARATUS AND ANNEALING APPARATUS
    • Publication number 20120325795
    • Publication date Dec 27, 2012
    • TOKYO ELECTRON LIMITED
    • Tomohiro SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
    • Publication number 20120328273
    • Publication date Dec 27, 2012
    • Hisashi KAWANO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ANNEALING APPARATUS
    • Publication number 20120279944
    • Publication date Nov 8, 2012
    • TOKYO ELECTRON LIMITED
    • Shigeru KASAI
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Application

    Liquid Processing Apparatus, Liquid Processing Method, and Recordin...
    • Publication number 20120160274
    • Publication date Jun 28, 2012
    • TOKYO ELECTRON LIMITED
    • Shigeru Kasai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ANNEALING APPARATUS
    • Publication number 20110174790
    • Publication date Jul 21, 2011
    • TOKYO ELECTRON LIMITED
    • Tomohiro Suzuki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING EQUIPMENT FOR OBJECT TO BE PROCESSED
    • Publication number 20110048034
    • Publication date Mar 3, 2011
    • TOKYO ELECTRON LIMITED
    • Masatake YONEDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ANNEALING APPARATUS
    • Publication number 20110033175
    • Publication date Feb 10, 2011
    • TOKYO ELECTRON LIMITED
    • Shigeru Kasai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THERMAL PROCESSING APPARATUS
    • Publication number 20110002674
    • Publication date Jan 6, 2011
    • TOKYO ELECTRON LIMITED
    • Masahiro Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ANNEALING DEVICE
    • Publication number 20100314377
    • Publication date Dec 16, 2010
    • TOKYO ELECTRON LIMITED
    • Shigeru Kasai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ANNEALING APPARATUS
    • Publication number 20100038833
    • Publication date Feb 18, 2010
    • Tokyo Electron Limited
    • Shigeru Kasai
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Application

    Processing Equipment for Object to be Processed
    • Publication number 20080230180
    • Publication date Sep 25, 2008
    • TOKYO ELECTRON LIMITED
    • Masatake Yoneda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEAT TREATMENT APPARATUS, COMPUTER PROGRAM, AND STORAGE MEDIUM
    • Publication number 20080187299
    • Publication date Aug 7, 2008
    • TOKYO ELECTRON LIMITED
    • Masahiro Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Shower head structure and cleaning method thereof
    • Publication number 20050082385
    • Publication date Apr 21, 2005
    • Tomonao Kuwada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Shower head structure and cleaning method thereof
    • Publication number 20020029748
    • Publication date Mar 14, 2002
    • Tomonao Kuwada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...