TREA

Masateru Morikawa

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  • Kikuchi-gun, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Coating film forming apparatus and coating unit
    • Patent number 7,087,118
    • Issue date Aug 8, 2006
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Coating film forming apparatus and coating unit
    • Patent number 6,936,107
    • Issue date Aug 30, 2005
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of forming film
    • Patent number 6,933,015
    • Issue date Aug 23, 2005
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Film forming unit
    • Patent number 6,872,256
    • Issue date Mar 29, 2005
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Substrate coating unit and substrate coating method
    • Patent number 6,860,945
    • Issue date Mar 1, 2005
    • Tokyo Electron Limited
    • Shinji Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Coating film forming apparatus and coating film forming method
    • Patent number 6,716,478
    • Issue date Apr 6, 2004
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Film forming unit
    • Patent number 6,695,922
    • Issue date Feb 24, 2004
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Coating film forming apparatus and coating unit
    • Patent number 6,676,757
    • Issue date Jan 13, 2004
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming apparatus and film forming method
    • Patent number 6,627,263
    • Issue date Sep 30, 2003
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Film forming unit
    • Patent number 6,616,760
    • Issue date Sep 9, 2003
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Coating film forming apparatus
    • Patent number 6,605,153
    • Issue date Aug 12, 2003
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Substrate processing unit and processing method
    • Patent number 6,599,366
    • Issue date Jul 29, 2003
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of forming film and apparatus thereof
    • Patent number 6,537,373
    • Issue date Mar 25, 2003
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Film forming unit
    • Patent number 6,514,344
    • Issue date Feb 4, 2003
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming apparatus and film forming method
    • Patent number 6,416,583
    • Issue date Jul 9, 2002
    • Tokyo Electron Limited
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Coating film forming apparatus and coating film forming method
    • Patent number 6,383,948
    • Issue date May 7, 2002
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming method and film forming apparatus
    • Patent number 6,371,667
    • Issue date Apr 16, 2002
    • Tokyo Electron Limited
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    Coating film forming apparatus and coating unit
    • Publication number 20050155550
    • Publication date Jul 21, 2005
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Substrate coating unit and substrate coating method
    • Publication number 20050100681
    • Publication date May 12, 2005
    • TOKYO ELECTRON LIMITED
    • Shinji Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating apparatus and coating method
    • Publication number 20040261701
    • Publication date Dec 30, 2004
    • Shinji Kobayashi
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Coating film forming apparatus and coating unit
    • Publication number 20040134425
    • Publication date Jul 15, 2004
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Film forming unit
    • Publication number 20040094089
    • Publication date May 20, 2004
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method of forming film and apparatus thereof
    • Publication number 20030118740
    • Publication date Jun 26, 2003
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Film forming apparatus and film forming method
    • Publication number 20020136829
    • Publication date Sep 26, 2002
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate coating unit and substrate coating method
    • Publication number 20020134304
    • Publication date Sep 26, 2002
    • TOKYO ELECTRON LIMITED
    • Shinji Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film forming unit
    • Publication number 20020124798
    • Publication date Sep 12, 2002
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film forming unit
    • Publication number 20020124797
    • Publication date Sep 12, 2002
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating film forming apparatus and coating film forming method
    • Publication number 20020088393
    • Publication date Jul 11, 2002
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating film forming apparatus
    • Publication number 20010003967
    • Publication date Jun 21, 2001
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film forming apparatus
    • Publication number 20010003966
    • Publication date Jun 21, 2001
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film forming unit
    • Publication number 20010003968
    • Publication date Jun 21, 2001
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating film forming apparatus and coating unit
    • Publication number 20010003964
    • Publication date Jun 21, 2001
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS