Masateru Sato

Person

SaijO, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ion implantation apparatus and method of cleaning ion implantation...
- Patent number 10,030,304
- Issue date Jul 24, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takayuki Nagai
- B08 - CLEANING
Information Patent Grant
Plasma generator and thermal electron emitter
- Patent number 9,659,755
- Issue date May 23, 2017
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam extraction slit structure and ion source
- Patent number 9,659,749
- Issue date May 23, 2017
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna cover and plasma generating device using same
- Patent number 9,502,759
- Issue date Nov 22, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generator and thermal electron emitter
- Patent number 9,425,023
- Issue date Aug 23, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generator and ion generating method
- Patent number 9,318,298
- Issue date Apr 19, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulation structure and insulation method
- Patent number 9,281,160
- Issue date Mar 8, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generation method and ion source
- Patent number 9,208,983
- Issue date Dec 8, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source device and ion beam generating method
- Patent number 9,153,405
- Issue date Oct 6, 2015
- Sen Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supporting structure and ion generator using the same
- Patent number 9,153,406
- Issue date Oct 6, 2015
- Sen Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulation structure of high voltage electrodes for ion implantatio...
- Patent number 9,117,630
- Issue date Aug 25, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source apparatus and cleaning optimized method thereof
- Patent number 7,947,129
- Issue date May 24, 2011
- SEN Corporation, an SHI and Axcelis Company
- Hirohiko Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source apparatus and electronic energy optimized method therefor
- Patent number 7,012,263
- Issue date Mar 14, 2006
- Sumitomo Eaton Nova Corporation
- Hirohiko Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source having wide output current operating range
- Patent number 6,060,718
- Issue date May 9, 2000
- Eaton Corporation
- Adam A. Brailove
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanting apparatus
- Patent number 4,914,292
- Issue date Apr 3, 1990
- Sumitomo Eaton Nova Corporation
- Tadamoto Tamai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanting system
- Patent number 4,904,902
- Issue date Feb 27, 1990
- Sumitomo Eaton Nova Corporation
- Tadamoto Tamai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION GENERATION DEVICE AND ION IMPLANTER
- Publication number 20240266140
- Publication date Aug 8, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Sho KAWATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATOR AND THERMAL ELECTRON EMITTER
- Publication number 20160351379
- Publication date Dec 1, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM EXTRACTION SLIT STRUCTURE AND ION SOURCE
- Publication number 20160111250
- Publication date Apr 21, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ION GENERATOR AND THERMAL ELECTRON EMITTER
- Publication number 20150340194
- Publication date Nov 26, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTING STRUCTURE AND ION GENERATOR USING THE SAME
- Publication number 20150179385
- Publication date Jun 25, 2015
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA COVER AND PLASMA GENERATING DEVICE USING SAME
- Publication number 20150162657
- Publication date Jun 11, 2015
- SEN Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATOR AND ION GENERATING METHOD
- Publication number 20150129775
- Publication date May 14, 2015
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATION STRUCTURE AND INSULATION METHOD
- Publication number 20140353518
- Publication date Dec 4, 2014
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATION STRUCTURE OF HIGH VOLTAGE ELECTRODES FOR ION IMPLANTATIO...
- Publication number 20140291543
- Publication date Oct 2, 2014
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND METHOD OF CLEANING ION IMPLANTATION...
- Publication number 20140283745
- Publication date Sep 25, 2014
- SEN Corporation
- Takayuki Nagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION GENERATION METHOD AND ION SOURCE
- Publication number 20140062286
- Publication date Mar 6, 2014
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE DEVICE AND ION BEAM GENERATING METHOD
- Publication number 20130249400
- Publication date Sep 26, 2013
- SEN Corporation
- Masateru SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source apparatus and cleaning optimized method thereof
- Publication number 20050016838
- Publication date Jan 27, 2005
- Hirohiko Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source apparatus and electronic energy optimized method therefor
- Publication number 20040251424
- Publication date Dec 16, 2004
- SUMITOMO EATON NOVA CORPORATION
- Hirohiko Murata
- H01 - BASIC ELECTRIC ELEMENTS

Masateru Sato

Person

Patents Grantslast 30 patents

Ion implantation apparatus and method of cleaning ion implantation...

Plasma generator and thermal electron emitter

Beam extraction slit structure and ion source

Antenna cover and plasma generating device using same

Ion generator and thermal electron emitter

Ion generator and ion generating method

Insulation structure and insulation method

Ion generation method and ion source

Ion source device and ion beam generating method

Supporting structure and ion generator using the same

Insulation structure of high voltage electrodes for ion implantatio...

Ion source apparatus and cleaning optimized method thereof

Ion source apparatus and electronic energy optimized method therefor

Ion source having wide output current operating range

Ion implanting apparatus

Ion implanting system

Patents Applicationslast 30 patents

ION GENERATION DEVICE AND ION IMPLANTER

PLASMA GENERATOR AND THERMAL ELECTRON EMITTER

BEAM EXTRACTION SLIT STRUCTURE AND ION SOURCE

ION GENERATOR AND THERMAL ELECTRON EMITTER

SUPPORTING STRUCTURE AND ION GENERATOR USING THE SAME

ANTENNA COVER AND PLASMA GENERATING DEVICE USING SAME

ION GENERATOR AND ION GENERATING METHOD

INSULATION STRUCTURE AND INSULATION METHOD

INSULATION STRUCTURE OF HIGH VOLTAGE ELECTRODES FOR ION IMPLANTATIO...

ION IMPLANTATION APPARATUS AND METHOD OF CLEANING ION IMPLANTATION...

ION GENERATION METHOD AND ION SOURCE

ION SOURCE DEVICE AND ION BEAM GENERATING METHOD

Ion source apparatus and cleaning optimized method thereof

Ion source apparatus and electronic energy optimized method therefor