Masateru Tokunaga

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for controlling stages, apparatus therefor, and scanning typ...
- Patent number 6,285,437
- Issue date Sep 4, 2001
- Nikon Corporation
- Masateru Tokunaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage driving exposure apparatus wherein the number of driving devi...
- Patent number 5,883,702
- Issue date Mar 16, 1999
- Nikon Corporation
- Masateru Tokunaga
- G05 - CONTROLLING REGULATING