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Masato ARAKI

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD AND APPARATUS OF EMBEDDING RUTHENIUM INTO RECESS
    • Publication number 20250163570
    • Publication date May 22, 2025
    • Tokyo Electron Limited
    • Masato ARAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION METHOD AND DEPOSITION APPARATUS
    • Publication number 20230272523
    • Publication date Aug 31, 2023
    • TOKYO ELECTRON LIMITED
    • Yuichi FURUYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING METHOD AND FILM-FORMING SYSTEM
    • Publication number 20230090881
    • Publication date Mar 23, 2023
    • TOKYO ELECTRON LIMITED
    • Masato ARAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR FORMING RUTHENIUM FILM
    • Publication number 20220145451
    • Publication date May 12, 2022
    • TOKYO ELECTRON LIMITED
    • Shunji YAMAKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210054503
    • Publication date Feb 25, 2021
    • TOKYO ELECTRON LIMITED
    • Masato ARAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Method and Film Forming System
    • Publication number 20200258747
    • Publication date Aug 13, 2020
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...