Masato ISHII

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cluster tools, systems, and methods having one or more pressure sta...
- Patent number 11,965,241
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Saurabh Chopra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,784,076
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,424,149
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 10,755,955
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas flow control for EPI thickness uniformity improvement
- Patent number 10,607,837
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Masato Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer mechanisms
- Patent number 10,453,733
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical endpoint detection system
- Patent number 10,179,354
- Issue date Jan 15, 2019
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer mechanisms
- Patent number 9,905,454
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Masato Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-heat ring designs to increase deposition uniformity and substra...
- Patent number 9,890,455
- Issue date Feb 13, 2018
- Applied Materials, Inc.
- Nyi O. Myo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor support shaft with uniformity tuning lenses for EPI process
- Patent number 9,532,401
- Issue date Dec 27, 2016
- Applied Materials, Inc.
- Zhepeng Cong
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical endpoint detection system
- Patent number 9,347,132
- Issue date May 24, 2016
- Applied Materials, Inc.
- Balasubramanian Ramachandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming silicon germanium layers
- Patent number 8,501,594
- Issue date Aug 6, 2013
- Applied Materials, Inc.
- Yi-Chiau Huang
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
SUSCEPTOR
- Publication number 20240347372
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Balakrishnam R. JAMPANA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240170321
- Publication date May 23, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR TRANSFER FOR PROCESS CHAMBER
- Publication number 20240105485
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Ribhu GAUTAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLAT SUSCEPTOR WITH GRID PATTERN AND VENTING GROOVES ON SURFACE THE...
- Publication number 20240014065
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20230420279
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
- Publication number 20230402268
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Songjae LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLUSTER TOOLS, SYSTEMS, AND METHODS HAVING ONE OR MORE PRESSURE STA...
- Publication number 20230075715
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Saurabh CHOPRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20220351999
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20200303228
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING AN RF SILICON ON INSULATOR DEVICE
- Publication number 20200105575
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20190252229
- Publication date Aug 15, 2019
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISMS
- Publication number 20180182660
- Publication date Jun 28, 2018
- Applied Materials, Inc.
- Masato ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW CONTROL FOR EPI THICKNESS UNIFORMITY IMPROVEMENT
- Publication number 20180053653
- Publication date Feb 22, 2018
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL ENDPOINT DETECTION SYSTEM
- Publication number 20160263634
- Publication date Sep 15, 2016
- BALASUBRAMANIAN RAMACHANDRAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER MECHANISMS
- Publication number 20160204019
- Publication date Jul 14, 2016
- Applied Materials, Inc.
- Masato ISHII
- C30 - CRYSTAL GROWTH
Information Patent Application
CHAMBER PRESSURE CONTROL APPARATUS FOR NEAR ATMOSPHERIC EPITAXIAL G...
- Publication number 20150013604
- Publication date Jan 15, 2015
- Applied Materials, Inc.
- Toshiyuki NAKAGAWA
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSCEPTOR SUPPORT SHAFT WITH UNIFORMITY TUNING LENSES FOR EPI PROCESS
- Publication number 20140263268
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Zhepeng Cong
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL ENDPOINT DETECTION SYSTEM
- Publication number 20120273005
- Publication date Nov 1, 2012
- Applied Materials, Inc.
- BALASUBRAMANIAN RAMACHANDRAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-HEAT RING DESIGNS TO INCREASE DEPOSITION UNIFORMITY AND SUBSTRA...
- Publication number 20120103263
- Publication date May 3, 2012
- Applied Materials, Inc.
- NYI O. MYO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING SILICON GERMANIUM LAYERS
- Publication number 20100317177
- Publication date Dec 16, 2010
- Applied Materials, Inc.
- Yi-Chiau HUANG
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR FORMING SILICON GERMANIUM LAYERS
- Publication number 20100120235
- Publication date May 13, 2010
- Applied Materials, Inc.
- Yi-Chiau HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masato ISHII

Person

Patents Grantslast 30 patents

Cluster tools, systems, and methods having one or more pressure sta...

Substrate transfer mechanism to reduce back-side substrate contact

Substrate transfer mechanism to reduce back-side substrate contact

Substrate transfer mechanism to reduce back-side substrate contact

Gas flow control for EPI thickness uniformity improvement

Substrate transfer mechanisms

Optical endpoint detection system

Substrate transfer mechanisms

Pre-heat ring designs to increase deposition uniformity and substra...

Susceptor support shaft with uniformity tuning lenses for EPI process

Optical endpoint detection system

Methods for forming silicon germanium layers

Patents Applicationslast 30 patents

SUSCEPTOR

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

SUSCEPTOR TRANSFER FOR PROCESS CHAMBER

FLAT SUSCEPTOR WITH GRID PATTERN AND VENTING GROOVES ON SURFACE THE...

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL

CLUSTER TOOLS, SYSTEMS, AND METHODS HAVING ONE OR MORE PRESSURE STA...

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

METHOD OF FORMING AN RF SILICON ON INSULATOR DEVICE

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

SUBSTRATE TRANSFER MECHANISMS

GAS FLOW CONTROL FOR EPI THICKNESS UNIFORMITY IMPROVEMENT

OPTICAL ENDPOINT DETECTION SYSTEM

SUBSTRATE TRANSFER MECHANISMS

CHAMBER PRESSURE CONTROL APPARATUS FOR NEAR ATMOSPHERIC EPITAXIAL G...

SUSCEPTOR SUPPORT SHAFT WITH UNIFORMITY TUNING LENSES FOR EPI PROCESS

OPTICAL ENDPOINT DETECTION SYSTEM

PRE-HEAT RING DESIGNS TO INCREASE DEPOSITION UNIFORMITY AND SUBSTRA...

METHODS FOR FORMING SILICON GERMANIUM LAYERS

METHODS FOR FORMING SILICON GERMANIUM LAYERS