Masato Kawakami

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming a vapor phase growth film
- Patent number 7,651,733
- Issue date Jan 26, 2010
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE COOLING DEVICE, SUBSTRATE COOLING METHOD AND HEAT TREATME...
- Publication number 20130062035
- Publication date Mar 14, 2013
- TOKYO ELECTRON LIMITED
- Masato Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20110201208
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Masato Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MEASURING METHOD, PLASMA MEASURING DEVICE AND STORAGE MEDIUM
- Publication number 20100321029
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Toru Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND APPARATUS
- Publication number 20100267243
- Publication date Oct 21, 2010
- TOKYO ELECTRON LIMITED
- Masato Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING APPARATUS, FILM-FORMING METHOD AND RECORDING MEDIUM
- Publication number 20090269494
- Publication date Oct 29, 2009
- TOKYO ELECTRON LIMITED
- Tsuyoshi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor-phase growing unit
- Publication number 20060257568
- Publication date Nov 16, 2006
- Kazuhide Hasebe
- C30 - CRYSTAL GROWTH
Information Patent Application
Gaseous phase growing device
- Publication number 20030186560
- Publication date Oct 2, 2003
- Kazuhide Hasebe
- C30 - CRYSTAL GROWTH

Masato Kawakami

Person

Patents Grantslast 30 patents

Method for forming a vapor phase growth film

Patents Applicationslast 30 patents

SUBSTRATE COOLING DEVICE, SUBSTRATE COOLING METHOD AND HEAT TREATME...

PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS

PLASMA MEASURING METHOD, PLASMA MEASURING DEVICE AND STORAGE MEDIUM

PLASMA PROCESSING METHOD AND APPARATUS

FILM-FORMING APPARATUS, FILM-FORMING METHOD AND RECORDING MEDIUM

Vapor-phase growing unit

Gaseous phase growing device