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Masato Koakutsu
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Iwate, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing a semiconductor device and film deposition...
Patent number
11,075,076
Issue date
Jul 27, 2021
Tokyo Electron Limited
Takahito Umehara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning exhaust pipe
Patent number
10,975,466
Issue date
Apr 13, 2021
Tokyo Electron Limited
Takahito Umehara
B08 - CLEANING
Information
Patent Grant
Film forming method
Patent number
10,961,623
Issue date
Mar 30, 2021
Tokyo Electron Limited
Masato Koakutsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing film
Patent number
9,748,104
Issue date
Aug 29, 2017
Tokyo Electron Limited
Hiroko Sasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing film
Patent number
9,136,133
Issue date
Sep 15, 2015
Tokyo Electron Limited
Kentaro Oshimo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature measurement apparatus, method of estimating temperature...
Patent number
8,992,079
Issue date
Mar 31, 2015
Tokyo Electron Limited
Masayuki Moroi
G01 - MEASURING TESTING
Information
Patent Grant
Method of depositing a film using a turntable apparatus
Patent number
8,987,147
Issue date
Mar 24, 2015
Tokyo Electron Limited
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing a film
Patent number
8,921,237
Issue date
Dec 30, 2014
Tokyo Electron Limited
Kentaro Oshimo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF CLEANING EXHAUST PIPE
Publication number
20210180182
Publication date
Jun 17, 2021
TOKYO ELECTRON LIMITED
Takahito UMEHARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD
Publication number
20190194807
Publication date
Jun 27, 2019
TOKYO ELECTRON LIMITED
Masato KOAKUTSU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND FILM DEPOSITION...
Publication number
20190172707
Publication date
Jun 6, 2019
TOKYO ELECTRON LIMITED
Takahito UMEHARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF CLEANING EXHAUST PIPE
Publication number
20190078198
Publication date
Mar 14, 2019
TOKYO ELECTRON LIMITED
Takahito UMEHARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING FILM
Publication number
20150031204
Publication date
Jan 29, 2015
TOKYO ELECTRON LIMITED
Hiroko SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DEPOSITING FILM
Publication number
20150011087
Publication date
Jan 8, 2015
TOKYO ELECTRON LIMITED
Kentaro OSHIMO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM DEPOSITION APPARATUS
Publication number
20140209028
Publication date
Jul 31, 2014
TOKYO ELECTRON LIMITED
Kentaro OSHIMO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING A FILM
Publication number
20140179104
Publication date
Jun 26, 2014
TOKYO ELECTRON LIMITED
Kentaro Oshimo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING A FILM
Publication number
20140179121
Publication date
Jun 26, 2014
TOKYO ELECTRON LIMITED
Hiroaki IKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD
Publication number
20130164936
Publication date
Jun 27, 2013
TOKYO ELECTRON LIMITED
Kentaro OSHIMO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE MEASUREMENT APPARATUS, METHOD OF ESTIMATING TEMPERATURE...
Publication number
20130130187
Publication date
May 23, 2013
TOKYO ELECTRON LIMITED
Masayuki MOROI
G01 - MEASURING TESTING