Masato Koizumi

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Yamanashi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method, cleaning method and film formation apparatus
- Patent number 8,021,717
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Seishi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus, film forming method, program and storage me...
- Patent number 7,713,886
- Issue date May 11, 2010
- Tokyo Electron Limited
- Hirokatsu Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a laminated structure to enhance metal silicide a...
- Patent number 6,489,208
- Issue date Dec 3, 2002
- Tokyo Electron Limited
- Masato Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminated structure and a method of forming the same
- Patent number 6,404,021
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Masato Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor for bearing an object to be processed thereon
- Patent number 6,042,653
- Issue date Mar 28, 2000
- Tokyo Electron Limited
- Sumi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD, CLEANING METHOD AND FILM FORMATION APPARATUS
- Publication number 20090142513
- Publication date Jun 4, 2009
- TOKYO ELECTRON LIMITED
- Seishi MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, PROGRAM AND STORAGE ME...
- Publication number 20070204147
- Publication date Aug 30, 2007
- TOKYO ELECTRON LIMITED
- Hirokatsu Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laminated structure and a method of forming the same
- Publication number 20020058384
- Publication date May 16, 2002
- Masato Koizumi
- H01 - BASIC ELECTRIC ELEMENTS