Masato KON

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Edge ring, plasma processing apparatus, and manufacturing method of...
- Patent number 11,887,821
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Masato Kon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,495,444
- Issue date Nov 8, 2022
- Tokyo Electron Limited
- Masato Kon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,361,946
- Issue date Jun 14, 2022
- Tokyo Electron Limited
- Masato Kon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Matching method and plasma processing apparatus
- Patent number 10,903,051
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Masato Kon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING, PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD OF...
- Publication number 20210057194
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Masato KON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200335306
- Publication date Oct 22, 2020
- TOKYO ELECTRON LIMITED
- Masato KON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200176229
- Publication date Jun 4, 2020
- TOKYO ELECTRON LIMITED
- Masato KON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200176227
- Publication date Jun 4, 2020
- TOKYO ELECTRON LIMITED
- Masato Kon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200152432
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Masato KON
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
- Publication number 20180315629
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Masato KON
- H01 - BASIC ELECTRIC ELEMENTS