Masato Kumazawa

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Projection optical system, exposure apparatus, exposure method, dis...
- Patent number 8,867,019
- Issue date Oct 21, 2014
- Nikon Corporation
- Masato Kumazawa
- G02 - OPTICS
Information Patent Grant
Projection optical system, exposure apparatus, exposure method, dis...
- Patent number 8,305,556
- Issue date Nov 6, 2012
- Nikon Corporation
- Masato Kumazawa
- G02 - OPTICS
Information Patent Grant
Projection optical apparatus, exposure method and apparatus, photom...
- Patent number 8,130,364
- Issue date Mar 6, 2012
- Nikon Corporation
- Masato Kumazawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 7,372,543
- Issue date May 13, 2008
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 7,372,544
- Issue date May 13, 2008
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 7,023,527
- Issue date Apr 4, 2006
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 6,795,169
- Issue date Sep 21, 2004
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure/imaging apparatus and method in which imaging characterist...
- Patent number 6,556,278
- Issue date Apr 29, 2003
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Aperture stop having central aperture region defined by a circular...
- Patent number 6,509,954
- Issue date Jan 21, 2003
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and exposure method for transferring pattern ont...
- Patent number 6,351,305
- Issue date Feb 26, 2002
- Nikon Corporation
- Masahi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure apparatus
- Patent number 6,157,497
- Issue date Dec 5, 2000
- Nikon Corporation
- Masato Kumazawa
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 5,729,331
- Issue date Mar 17, 1998
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Apparatus for measuring dimensions of micropattern
- Patent number 4,744,662
- Issue date May 17, 1988
- Nippon Kogaku K.K.
- Takeshi Suto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Projection Optical System, Exposure Apparatus, Exposure Method, Dis...
- Publication number 20130021589
- Publication date Jan 24, 2013
- Nikon Corporation
- Masato KUMAZAWA
- G02 - OPTICS
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, EXPOSURE METHOD, DIS...
- Publication number 20090021712
- Publication date Jan 22, 2009
- Nikon Corporation
- Masato KUMAZAWA
- G02 - OPTICS
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20080192216
- Publication date Aug 14, 2008
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Projection optical apparatus, exposure method and apparatus, photom...
- Publication number 20080165333
- Publication date Jul 10, 2008
- Nikon Corporation
- Masato Kumazawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection optical apparatus, exposure method and apparatus, photom...
- Publication number 20080165334
- Publication date Jul 10, 2008
- Nikon Corporation
- Masato Kumazawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20070216885
- Publication date Sep 20, 2007
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20060238729
- Publication date Oct 26, 2006
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20050012917
- Publication date Jan 20, 2005
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20030137644
- Publication date Jul 24, 2003
- NIKON CORPORATION
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Condenser optical system and illumination optical apparatus provide...
- Publication number 20020171944
- Publication date Nov 21, 2002
- Nikon Corporation
- Yutaka Suenaga
- G02 - OPTICS

Masato Kumazawa

Person

Patents Grantslast 30 patents

Projection optical system, exposure apparatus, exposure method, dis...

Projection optical system, exposure apparatus, exposure method, dis...

Projection optical apparatus, exposure method and apparatus, photom...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure/imaging apparatus and method in which imaging characterist...

Aperture stop having central aperture region defined by a circular...

Exposure apparatus and exposure method for transferring pattern ont...

Exposure apparatus

Exposure apparatus, optical projection apparatus and a method for a...

Apparatus for measuring dimensions of micropattern

Patents Applicationslast 30 patents

Projection Optical System, Exposure Apparatus, Exposure Method, Dis...

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, EXPOSURE METHOD, DIS...

Exposure apparatus, optical projection apparatus and a method for a...

Projection optical apparatus, exposure method and apparatus, photom...

Projection optical apparatus, exposure method and apparatus, photom...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Condenser optical system and illumination optical apparatus provide...