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Masato KURITA
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Yokkaichi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing apparatus
Patent number
6,997,778
Issue date
Feb 14, 2006
Ebara Corporation
Koji Ono
B24 - GRINDING POLISHING
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Patent Grant
Polishing apparatus
Patent number
6,634,924
Issue date
Oct 21, 2003
Ebara Corporation
Koji Ono
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20160276181
Publication date
Sep 22, 2016
Kabushiki Kaisha Toshiba
Masato KURITA
B08 - CLEANING
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR MANUFACTURING...
Publication number
20160064262
Publication date
Mar 3, 2016
Kabushiki Kaisha Toshiba
Yoshihisa OOSAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Polishing apparatus
Publication number
20040033761
Publication date
Feb 19, 2004
Koji Ono
B24 - GRINDING POLISHING