Masato MIZUTA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate heating method
- Patent number 10,256,122
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Masato Mizuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, heat treatment method, and storage medium
- Patent number 10,217,652
- Issue date Feb 26, 2019
- Tokyo Electron Limited
- Masato Mizuta
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate heating device, substrate heating method and computer-rea...
- Patent number 9,991,140
- Issue date Jun 5, 2018
- Tokyo Electron Limited
- Masato Mizuta
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HEATING DEVICE, SUBSTRATE HEATING METHOD AND COMPUTER-REA...
- Publication number 20180254205
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Masato MIZUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND STORAGE MEDIUM
- Publication number 20160172218
- Publication date Jun 16, 2016
- TOKYO ELECTRON LIMITED
- Masato Mizuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Heating Device, Substrate Heating Method and Computer-Rea...
- Publication number 20160042984
- Publication date Feb 11, 2016
- TOKYO ELECTRON LIMITED
- Masato MIZUTA
- H01 - BASIC ELECTRIC ELEMENTS