Membership
Tour
Register
Log in
Masato MORISHIMA
Follow
Person
Nirasaki City, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method for processing workpiece
Patent number
10,763,106
Issue date
Sep 1, 2020
Tokyo Electron Limited
Kenji Ouchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma electrode and plasma processing device
Patent number
10,600,621
Issue date
Mar 24, 2020
Tokyo Electron Limited
Masato Morishima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
9,926,624
Issue date
Mar 27, 2018
Tokyo Electron Limited
Kazuki Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process gas introducing mechanism and plasma processing device
Patent number
8,191,505
Issue date
Jun 5, 2012
Tokyo Electron Limited
Takayuki Kamaishi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PROCESSING WORKPIECE
Publication number
20190189437
Publication date
Jun 20, 2019
TOKYO ELECTRON LIMITED
Kenji OUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA ELECTRODE AND PLASMA PROCESSING DEVICE
Publication number
20190108984
Publication date
Apr 11, 2019
TOKYO ELECTRON LIMITED
Masato MORISHIMA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20150368802
Publication date
Dec 24, 2015
TOKYO ELECTRON LIMITED
Kazuki YAMADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20150132960
Publication date
May 14, 2015
TOKYO ELECTRON LIMITED
Eiichi Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING DEVICE
Publication number
20140373783
Publication date
Dec 25, 2014
Ikuo SAWADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION APPARATUS
Publication number
20120247390
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
Ikuo Sawada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20100206846
Publication date
Aug 19, 2010
TOKYO ELECTRON LIMITED
Eiichi Nishimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process gas introducing mechanism and plasma processing device
Publication number
20090260762
Publication date
Oct 22, 2009
TOKYO ELECTRON LIMITED
Takayuki Kamaishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing a fin field effect transistor
Publication number
20080132077
Publication date
Jun 5, 2008
TOKYO ELECTRON LIMITED
Masato Morishima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Film formation method
Publication number
20060127601
Publication date
Jun 15, 2006
TOKYO ELECTRON LIMITED
Seishi Murakami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process gas introducing mechanism and plasma processing device
Publication number
20060060141
Publication date
Mar 23, 2006
TOKYO ELECTRON LIMITED
Takayuki Kamaishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Worktable device, film formation apparatus, and film formation meth...
Publication number
20050257747
Publication date
Nov 24, 2005
Satoshi Wakabayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CVD method
Publication number
20010021414
Publication date
Sep 13, 2001
Masato Morishima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...