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Patents Grants
last 30 patents
Information
Patent Grant
Drawing apparatus, and method of manufacturing article by controlli...
Patent number
10,361,067
Issue date
Jul 23, 2019
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drawing method and method of manufacturing article
Patent number
9,690,201
Issue date
Jun 27, 2017
Canon Kabushiki Kaisha
Kouichirou Tsujita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Drawing apparatus, lithography system, pattern data creation method...
Patent number
9,583,311
Issue date
Feb 28, 2017
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography system and method of manufacturing articles
Patent number
9,558,916
Issue date
Jan 31, 2017
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drawing apparatus, and method of manufacturing article
Patent number
9,455,124
Issue date
Sep 27, 2016
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drawing apparatus, and method of manufacturing article
Patent number
9,293,292
Issue date
Mar 22, 2016
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drawing apparatus, and method of manufacturing article
Patent number
9,245,715
Issue date
Jan 26, 2016
Canon Kabushiki Kaisha
Tomoyuki Morita
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Drawing apparatus, and method of manufacturing article
Patent number
9,171,698
Issue date
Oct 27, 2015
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Blanking apparatus, drawing apparatus, and method of manufacturing...
Patent number
9,040,935
Issue date
May 26, 2015
Canon Kabushiki Kaisha
Tomoyuki Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drawing apparatus, data processing method, and method of manufactur...
Patent number
9,001,387
Issue date
Apr 7, 2015
Canon Kabushiki Kaisha
Masato Muraki
G11 - INFORMATION STORAGE
Information
Patent Grant
Drawing apparatus, drawing method, and method of manufacturing article
Patent number
8,759,797
Issue date
Jun 24, 2014
Canon Kabushiki Kaisha
Masato Muraki
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Charged particle optical system, drawing apparatus, and method of m...
Patent number
8,716,672
Issue date
May 6, 2014
Canon Kabushiki Kaisha
Kentaro Sano
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam exposure apparatus
Patent number
8,692,218
Issue date
Apr 8, 2014
Canon Kabushiki Kaisha
Masato Muraki
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Drawing apparatus and method of manufacturing article
Patent number
8,610,082
Issue date
Dec 17, 2013
Canon Kabushiki Kaisha
Kentaro Sano
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of manufacturing image display apparatus using sputtering
Patent number
8,083,562
Issue date
Dec 27, 2011
Canon Kabushiki Kaisha
Hiromasa Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron source manufacturing method
Patent number
8,075,361
Issue date
Dec 13, 2011
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus and method of generating an electron beam i...
Patent number
8,008,622
Issue date
Aug 30, 2011
Hitachi High-Technologies Corporation
Ryo Fujita
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam exposure apparatus
Patent number
7,692,166
Issue date
Apr 6, 2010
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus and method of generating an electron beam i...
Patent number
7,635,851
Issue date
Dec 22, 2009
Hitachi High-Technologies Corporation
Ryo Fujita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration measuring apparatus for charged particle beam optical sy...
Patent number
7,378,671
Issue date
May 27, 2008
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mechanism for sealing
Patent number
7,341,393
Issue date
Mar 11, 2008
Canon Kabushiki Kaisha
Masaki Hosoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deflector, method of manufacturing deflector, and charged particle...
Patent number
7,276,707
Issue date
Oct 2, 2007
Canon Kabushiki Kaisha
Yuichi Iwasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration adjusting method, device fabrication method, and charged...
Patent number
7,230,252
Issue date
Jun 12, 2007
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam exposure apparatus, charged particle beam exp...
Patent number
7,173,262
Issue date
Feb 6, 2007
Canon Kabushiki Kaisha
Masaki Hosoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrooptic system array, charged-particle beam exposure apparatus...
Patent number
7,126,141
Issue date
Oct 24, 2006
Canon Kabushiki Kaisha
Haruhito Ono
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam writing equipment and electron beam writing method
Patent number
7,098,464
Issue date
Aug 29, 2006
Hitachi High-Technologies Corporation
Yasunari Sohda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam exposure method, charged particle beam exposu...
Patent number
7,049,610
Issue date
May 23, 2006
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrooptic system array, charged-particle beam exposure apparatus...
Patent number
7,038,226
Issue date
May 2, 2006
Canon Kabushiki Kaisha
Haruhito Ono
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam writing equipment using plural beams and method
Patent number
7,015,482
Issue date
Mar 21, 2006
Hitachi, Ltd.
Yasunari Sohda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam exposure apparatus and method
Patent number
7,005,658
Issue date
Feb 28, 2006
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DRAWING APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160126061
Publication date
May 5, 2016
Canon Kabushiki Kaisha
Masato MURAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING APPARATUS, LITHOGRAPHY SYSTEM, PATTERN DATA CREATION METHOD...
Publication number
20160126062
Publication date
May 5, 2016
Canon Kabushiki Kaisha
Masato MURAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY SYSTEM AND METHOD OF MANUFACTURING ARTICLES
Publication number
20160118221
Publication date
Apr 28, 2016
Canon Kabushiki Kaisha
Masato MURAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20150044614
Publication date
Feb 12, 2015
Canon Kabushiki Kaisha
Koichi SENTOKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20150001419
Publication date
Jan 1, 2015
Canon Kabushiki Kaisha
Masato MURAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20150004807
Publication date
Jan 1, 2015
Canon Kabushiki Kaisha
Masato MURAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLANKING APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING...
Publication number
20150001417
Publication date
Jan 1, 2015
Canon Kabushiki Kaisha
Tomoyuki MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HOLDING APPARATUS, PROCESSING APPARATUS, AND METHOD OF MANUFACTURIN...
Publication number
20140320841
Publication date
Oct 30, 2014
Canon Kabushiki Kaisha
Masato MURAKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IRRADIATION APPARATUS FOR IRRADIATING CHARGED PARTICLE BEAM, METHOD...
Publication number
20140322833
Publication date
Oct 30, 2014
Canon Kabushiki Kaisha
Wataru Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20140322653
Publication date
Oct 30, 2014
Canon Kabushiki Kaisha
Masato MURAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20140319367
Publication date
Oct 30, 2014
Canon Kabushiki Kaisha
Masato MURAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20140106279
Publication date
Apr 17, 2014
Canon Kabushiki Kaisha
Tomoyuki MORITA
B82 - NANO-TECHNOLOGY
Information
Patent Application
DRAWING APPARATUS, DATA PROCESSING METHOD, AND METHOD OF MANUFACTUR...
Publication number
20130335503
Publication date
Dec 19, 2013
Masato Muraki
G11 - INFORMATION STORAGE
Information
Patent Application
CHARGED PARTICLE OPTICAL SYSTEM, DRAWING APPARATUS, AND METHOD OF M...
Publication number
20130273478
Publication date
Oct 17, 2013
Canon Kabushiki Kaisha
Kentaro Sano
B82 - NANO-TECHNOLOGY
Information
Patent Application
DRAWING APPARATUS, DRAWING METHOD, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20130264497
Publication date
Oct 10, 2013
Masato Muraki
B82 - NANO-TECHNOLOGY
Information
Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20130216954
Publication date
Aug 22, 2013
Canon Kabushiki Kaisha
Satoru Oishi
B82 - NANO-TECHNOLOGY
Information
Patent Application
DRAWING METHOD AND METHOD OF MANUFACTURING ARTICLE
Publication number
20130196517
Publication date
Aug 1, 2013
Canon Kabushiki Kaisha
Kouichirou Tsujita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20120241641
Publication date
Sep 27, 2012
Canon Kabushiki Kaisha
Kentaro Sano
B82 - NANO-TECHNOLOGY
Information
Patent Application
DRAWING APPARATUS, DRAWING METHOD AND METHOD OF MANUFACTURING ARTICLE
Publication number
20120219914
Publication date
Aug 30, 2012
Canon Kabushiki Kaisha
Masato Muraki
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron Beam Apparatus And Method Of Generating An Electron Beam I...
Publication number
20100078555
Publication date
Apr 1, 2010
Ryo Fujita
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron Beam Apparatus And Method of Generating An Electron Beam I...
Publication number
20100078556
Publication date
Apr 1, 2010
Ryo Fujita
B82 - NANO-TECHNOLOGY
Information
Patent Application
CONDUCTIVE MEMBER MANUFACTURING METHOD, AND ELECTRON SOURCE MANUFAC...
Publication number
20100062674
Publication date
Mar 11, 2010
Canon Kabushiki Kaisha
Masato Muraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING IMAGE DISPLAY APPARATUS
Publication number
20090203284
Publication date
Aug 13, 2009
Canon Kabushiki Kaisha
Hiromasa Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM EXPOSURE APPARATUS
Publication number
20080067402
Publication date
Mar 20, 2008
Masato Muraki
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM EXPOSURE APPARATUS
Publication number
20080067403
Publication date
Mar 20, 2008
Masato Muraki
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam apparatus and method of generating an electron beam i...
Publication number
20070057200
Publication date
Mar 15, 2007
Ryo Fujita
B82 - NANO-TECHNOLOGY
Information
Patent Application
Aberration measuring apparatus for charged particle beam optical sy...
Publication number
20060169898
Publication date
Aug 3, 2006
Canon Kabushiki Kaisha
Masato Muraki
B82 - NANO-TECHNOLOGY
Information
Patent Application
Aberration adjusting method, device fabrication method, and charged...
Publication number
20060169927
Publication date
Aug 3, 2006
Canon Kabushiki Kaisha
Masato Muraki
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged particle beam exposure apparatus, charged particle beam exp...
Publication number
20060017019
Publication date
Jan 26, 2006
Canon Kabushiki Kaisha
Masaki Hosoda
B82 - NANO-TECHNOLOGY
Information
Patent Application
Mechanism for sealing
Publication number
20060006342
Publication date
Jan 12, 2006
Canon Kabushiki Kaisha
Masaki Hosoda
H01 - BASIC ELECTRIC ELEMENTS