Masato SAKAMOTO

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and etching apparatus
- Patent number 10,847,379
- Issue date Nov 24, 2020
- Tokyo Electron Limited
- Masato Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EMBEDDING METHOD AND PROCESSING SYSTEM
- Publication number 20240153818
- Publication date May 9, 2024
- Tokyo Electron Limited
- Masato SAKAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVICE FOR MANUF...
- Publication number 20230377893
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Shunji YAMAKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Etching Method and Etching Apparatus
- Publication number 20190348299
- Publication date Nov 14, 2019
- TOKYO ELECTRON LIMITED
- Masato SAKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS