Masato TAKAYAMA

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck, support platform, and plasma processing apparatus
- Patent number 11,894,218
- Issue date Feb 6, 2024
- Tokyo Electron Limited
- Masato Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck for semiconductor manufacturing device
- Patent number D1012051
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Masato Takayama
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Focus ring
- Patent number D992614
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Yasuharu Sasaki
- D16 - Photography and optical equipment
Information Patent Grant
Temperature control apparatus, temperature control method and recor...
- Patent number 10,375,763
- Issue date Aug 6, 2019
- Tokyo Electron Limited
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING DEVICE
- Publication number 20240162075
- Publication date May 16, 2024
- TOKYO ELECTRON LIMITED
- Akira NAGAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK MANUFACTURING METHOD, ELECTROSTATIC CHUCK, AND...
- Publication number 20230268217
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Masato TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK MANUFACTURING METHOD, ELECTROSTATIC CHUCK, AND...
- Publication number 20210272834
- Publication date Sep 2, 2021
- TOKYO ELECTRON LIMITED
- Masato TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK, SUPPORT PLATFORM, AND PLASMA PROCESSING APPARATUS
- Publication number 20200388472
- Publication date Dec 10, 2020
- TOKYO ELECTRON LIMITED
- Masato TAKAYAMA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
TEMPERATURE CONTROL APPARATUS, TEMPERATURE CONTROL METHOD AND RECOR...
- Publication number 20160302258
- Publication date Oct 13, 2016
- TOKYO ELECTRON LIMITED
- Daisuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS