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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Gate valve and driving method
Patent number
11,994,234
Issue date
May 28, 2024
Tokyo Electron Limited
Norihiko Amikura
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Processing system and transfer method
Patent number
11,955,356
Issue date
Apr 9, 2024
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transfer apparatus
Patent number
11,948,816
Issue date
Apr 2, 2024
Tokyo Electron Limited
Masahiro Dogome
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, vacuum substrate transfer module, and...
Patent number
11,862,506
Issue date
Jan 2, 2024
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer system and load lock module
Patent number
11,791,180
Issue date
Oct 17, 2023
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle generation preventing method and vacuum apparatus
Patent number
10,643,825
Issue date
May 5, 2020
Tokyo Electron Limited
Takashi Tetsuka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND TRANSFER MODULE
Publication number
20240030011
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Toshiaki TOYOMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
Publication number
20230215753
Publication date
Jul 6, 2023
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE VALVE AND DRIVING METHOD
Publication number
20230160494
Publication date
May 25, 2023
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
TRANSFER SYSTEM, TRANSFER DEVICE, AND TRANSFER METHOD
Publication number
20220277981
Publication date
Sep 1, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
STORAGE CONTAINER AND PROCESSING SYSTEM
Publication number
20220243336
Publication date
Aug 4, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220230898
Publication date
Jul 21, 2022
TOKYO ELECTRON LIMITED
Masahiro Dogome
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER APPARATUS
Publication number
20220208574
Publication date
Jun 30, 2022
TOKYO ELECTRON LIMITED
Masahiro Dogome
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220208576
Publication date
Jun 30, 2022
TOKYO ELECTRON LIMITED
Masahiro DOGOME
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DETECTION DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD
Publication number
20220148857
Publication date
May 12, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SYSTEM AND TRANSFER METHOD
Publication number
20220130695
Publication date
Apr 28, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, PURGE GAS CONTROL METHOD, AND VACUU...
Publication number
20220080476
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
B08 - CLEANING
Information
Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
Publication number
20220068689
Publication date
Mar 3, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
G01 - MEASURING TESTING
Information
Patent Application
TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR
Publication number
20220051928
Publication date
Feb 17, 2022
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STORAGE MODULE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF TRANSFER...
Publication number
20210398838
Publication date
Dec 23, 2021
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, VACUUM SUBSTRATE TRANSFER MODULE, AND...
Publication number
20210287927
Publication date
Sep 16, 2021
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND LOAD LOCK MODULE
Publication number
20210280441
Publication date
Sep 9, 2021
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE GENERATION PREVENTING METHOD AND VACUUM APPARATUS
Publication number
20190108987
Publication date
Apr 11, 2019
TOKYO ELECTRON LIMITED
Takashi TETSUKA
H01 - BASIC ELECTRIC ELEMENTS