Masatomo KITA

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,198,952
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device, transfer system, and end effector
- Patent number 12,191,188
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Norihiko Amikura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system, transfer device, and transfer method
- Patent number 12,131,937
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage module, substrate processing system, and method of transfer...
- Patent number 12,125,738
- Issue date Oct 22, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,080,572
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gate valve and driving method
- Patent number 11,994,234
- Issue date May 28, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Processing system and transfer method
- Patent number 11,955,356
- Issue date Apr 9, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus
- Patent number 11,948,816
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, vacuum substrate transfer module, and...
- Patent number 11,862,506
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer system and load lock module
- Patent number 11,791,180
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle generation preventing method and vacuum apparatus
- Patent number 10,643,825
- Issue date May 5, 2020
- Tokyo Electron Limited
- Takashi Tetsuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20250046585
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Tatsuru OKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250046583
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Tatsuru OKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE AND DRIVING METHOD
- Publication number 20240309966
- Publication date Sep 19, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SUBSTRATE TRANSFER SYSTEM
- Publication number 20240222185
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Tatsuru OKAMURA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER APPARATUS
- Publication number 20240213057
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20240194504
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER MODULE AND TRANSFER METHOD
- Publication number 20240186158
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER MODULE AND TRANSFER METHOD
- Publication number 20240182252
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND TRANSFER MODULE
- Publication number 20240030011
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20230215753
- Publication date Jul 6, 2023
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE AND DRIVING METHOD
- Publication number 20230160494
- Publication date May 25, 2023
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
TRANSFER SYSTEM, TRANSFER DEVICE, AND TRANSFER METHOD
- Publication number 20220277981
- Publication date Sep 1, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
STORAGE CONTAINER AND PROCESSING SYSTEM
- Publication number 20220243336
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220230898
- Publication date Jul 21, 2022
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS
- Publication number 20220208574
- Publication date Jun 30, 2022
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220208576
- Publication date Jun 30, 2022
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETECTION DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD
- Publication number 20220148857
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20220130695
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PURGE GAS CONTROL METHOD, AND VACUU...
- Publication number 20220080476
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- B08 - CLEANING
Information Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
- Publication number 20220068689
- Publication date Mar 3, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- G01 - MEASURING TESTING
Information Patent Application
TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR
- Publication number 20220051928
- Publication date Feb 17, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE MODULE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF TRANSFER...
- Publication number 20210398838
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, VACUUM SUBSTRATE TRANSFER MODULE, AND...
- Publication number 20210287927
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND LOAD LOCK MODULE
- Publication number 20210280441
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE GENERATION PREVENTING METHOD AND VACUUM APPARATUS
- Publication number 20190108987
- Publication date Apr 11, 2019
- TOKYO ELECTRON LIMITED
- Takashi TETSUKA
- H01 - BASIC ELECTRIC ELEMENTS

Masatomo KITA

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Transfer device, transfer system, and end effector

Substrate processing system and transfer method

Transfer system, transfer device, and transfer method

Storage module, substrate processing system, and method of transfer...

Substrate processing apparatus

Gate valve and driving method

Processing system and transfer method

Transfer apparatus

Substrate processing system, vacuum substrate transfer module, and...

Substrate transfer system and load lock module

Particle generation preventing method and vacuum apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

SUBSTRATE PROCESSING SYSTEM

GATE VALVE AND DRIVING METHOD

SUBSTRATE TRANSFER SYSTEM

TRANSFER APPARATUS

PROCESSING SYSTEM AND TRANSFER METHOD

TRANSFER MODULE AND TRANSFER METHOD

TRANSFER MODULE AND TRANSFER METHOD

SUBSTRATE TRANSFER SYSTEM AND TRANSFER MODULE

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

GATE VALVE AND DRIVING METHOD

TRANSFER SYSTEM, TRANSFER DEVICE, AND TRANSFER METHOD

STORAGE CONTAINER AND PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS

TRANSFER APPARATUS

SUBSTRATE PROCESSING APPARATUS

DETECTION DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD

PROCESSING SYSTEM AND TRANSFER METHOD

SUBSTRATE PROCESSING APPARATUS, PURGE GAS CONTROL METHOD, AND VACUU...

TRANSFER APPARATUS AND TRANSFER METHOD

TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR

STORAGE MODULE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF TRANSFER...

SUBSTRATE PROCESSING SYSTEM, VACUUM SUBSTRATE TRANSFER MODULE, AND...

SUBSTRATE TRANSFER SYSTEM AND LOAD LOCK MODULE

PARTICLE GENERATION PREVENTING METHOD AND VACUUM APPARATUS