Masatoshi Deguchi

Person

Kumamoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Joining method and joining system
- Patent number 9,484,236
- Issue date Nov 1, 2016
- Tokyo Electron Limited
- Shinji Okada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Joining method and joining system
- Patent number 9,463,612
- Issue date Oct 11, 2016
- Tokyo Electron Limited
- Shinji Okada
- B32 - LAYERED PRODUCTS
Information Patent Grant
Joint method, joint apparatus and joint system
- Patent number 8,899,289
- Issue date Dec 2, 2014
- Tokyo Electron Limited
- Masatoshi Deguchi
- B32 - LAYERED PRODUCTS
Information Patent Grant
Bonding system and bonding method
- Patent number 8,846,495
- Issue date Sep 30, 2014
- Tokyo Electron Limited
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate treatment method, and non-tra...
- Patent number 8,707,893
- Issue date Apr 29, 2014
- Tokyo Electron Limited
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for heat processing of substrate
- Patent number 7,517,217
- Issue date Apr 14, 2009
- Tokyo Electron Limited
- Masatoshi Deguchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,208,066
- Issue date Apr 24, 2007
- Tokyo Electron Limited
- Junichi Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for heat processing of substrate
- Patent number 6,969,538
- Issue date Nov 29, 2005
- Tokyo Electron Limited
- Masatoshi Deguchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for applying process solution
- Patent number 6,821,550
- Issue date Nov 23, 2004
- Tokyo Electron Limited
- Masatoshi Deguchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus
- Patent number 6,659,661
- Issue date Dec 9, 2003
- Tokyo Electron Limited
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,473,151
- Issue date Oct 29, 2002
- Tokyo Electron Limited
- Masatoshi Deguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 6,466,300
- Issue date Oct 15, 2002
- Tokyo Electron Limited
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for applying process solution
- Patent number 6,281,145
- Issue date Aug 28, 2001
- Tokyo Electron Limited
- Masatoshi Deguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming coating film and apparatus therefor
- Patent number 6,063,190
- Issue date May 16, 2000
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solvent and resist spin coating apparatus
- Patent number 5,942,035
- Issue date Aug 24, 1999
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming coating film and apparatus therefor
- Patent number 5,658,615
- Issue date Aug 19, 1997
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus and method
- Patent number 5,580,607
- Issue date Dec 3, 1996
- Tokyo Electron Limited
- Takashi Takekuma
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BONDING SYSTEM AND BONDING METHOD
- Publication number 20150251398
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Masatoshi DEGUCHI
- B32 - LAYERED PRODUCTS
Information Patent Application
SEPARATION METHOD, COMPUTER STORAGE MEDIUM, AND SEPARATION SYSTEM
- Publication number 20140335633
- Publication date Nov 13, 2014
- TOKYO ELECTRON LIMITED
- Shinji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEPARATION APPARATUS, SEPARATION SYSTEM, SEPARATION METHOD AND NON-...
- Publication number 20140284000
- Publication date Sep 25, 2014
- Yasutaka SOMA
- B32 - LAYERED PRODUCTS
Information Patent Application
PEELING DEVICE, PEELING SYSTEM AND PEELING METHOD
- Publication number 20140251546
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Masatoshi DEGUCHI
- B32 - LAYERED PRODUCTS
Information Patent Application
JOINING METHOD AND JOINING SYSTEM
- Publication number 20140224763
- Publication date Aug 14, 2014
- TOKYO ELECTRON LIMITED
- Shinji OKADA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
JOINING METHOD AND JOINING SYSTEM
- Publication number 20140224414
- Publication date Aug 14, 2014
- TOKYO ELECTRON LIMITED
- Shinji Okada
- B32 - LAYERED PRODUCTS
Information Patent Application
BONDING SYSTEM AND BONDING METHOD
- Publication number 20130316516
- Publication date Nov 28, 2013
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JOINT METHOD, JOINT APPARATUS AND JOINT SYSTEM
- Publication number 20130071996
- Publication date Mar 21, 2013
- TOKYO ELECTRON LIMITED
- Masatoshi DEGUCHI
- B32 - LAYERED PRODUCTS
Information Patent Application
JOINT APPARATUS, JOINT SYSTEM, AND JOINT METHOD
- Publication number 20130062013
- Publication date Mar 14, 2013
- TOKYO ELECTRON LIMITED
- Shinji OKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND CLEANING APPARATUS
- Publication number 20130000684
- Publication date Jan 3, 2013
- TOKYO ELECTRON LIMITED
- Yasutaka SOMA
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TREATMENT METHOD, AND NON-TRA...
- Publication number 20120135148
- Publication date May 31, 2012
- TOKYO ELECTRON LIMITED
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070127916
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Junichi Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070128356
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Yuji Matsuyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for heat processing of substrate
- Publication number 20060005420
- Publication date Jan 12, 2006
- TOKYO ELECTRON LIMITED
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20040050321
- Publication date Mar 18, 2004
- TOKYO ELECTRON LIMITED
- Junichi Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus
- Publication number 20020114632
- Publication date Aug 22, 2002
- TOKYO ELECTRON LIMITED
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for heat processing of substrate
- Publication number 20020034714
- Publication date Mar 21, 2002
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for applying process solution
- Publication number 20010037763
- Publication date Nov 8, 2001
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20010013161
- Publication date Aug 16, 2001
- TOKYO ELECTRON LIMITED
- Junichi Kitano
- H01 - BASIC ELECTRIC ELEMENTS

Masatoshi Deguchi

Person

Patents Grantslast 30 patents

Joining method and joining system

Joining method and joining system

Joint method, joint apparatus and joint system

Bonding system and bonding method

Substrate treatment system, substrate treatment method, and non-tra...

Method and apparatus for heat processing of substrate

Substrate processing apparatus and substrate processing method

Method for heat processing of substrate

Apparatus and method for applying process solution

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Apparatus and method for applying process solution

Method of forming coating film and apparatus therefor

Solvent and resist spin coating apparatus

Method of forming coating film and apparatus therefor

Coating apparatus and method

Patents Applicationslast 30 patents

BONDING SYSTEM AND BONDING METHOD

SEPARATION METHOD, COMPUTER STORAGE MEDIUM, AND SEPARATION SYSTEM

SEPARATION APPARATUS, SEPARATION SYSTEM, SEPARATION METHOD AND NON-...

PEELING DEVICE, PEELING SYSTEM AND PEELING METHOD

JOINING METHOD AND JOINING SYSTEM

JOINING METHOD AND JOINING SYSTEM

BONDING SYSTEM AND BONDING METHOD

JOINT METHOD, JOINT APPARATUS AND JOINT SYSTEM

JOINT APPARATUS, JOINT SYSTEM, AND JOINT METHOD

CLEANING METHOD AND CLEANING APPARATUS

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TREATMENT METHOD, AND NON-TRA...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Method and apparatus for heat processing of substrate

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Method and apparatus for heat processing of substrate

Apparatus and method for applying process solution

Substrate processing apparatus and substrate processing method