Masatoshi Endo

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, method thereof, and method of manufacturing art...
- Patent number 10,635,005
- Issue date Apr 28, 2020
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of obtaining position, exposure method, and method of manufa...
- Patent number 10,031,429
- Issue date Jul 24, 2018
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,946,169
- Issue date Apr 17, 2018
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring apparatus, measuring method, lithography apparatus, and a...
- Patent number 9,665,018
- Issue date May 30, 2017
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device, lithography apparatus using same, and dev...
- Patent number 9,195,129
- Issue date Nov 24, 2015
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device, lithography apparatus using same, and dev...
- Patent number 8,472,007
- Issue date Jun 25, 2013
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, METHOD THEREOF, AND METHOD OF MANUFACTURING ART...
- Publication number 20190265599
- Publication date Aug 29, 2019
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASURING APPARATUS, MEASURING METHOD, LITHOGRAPHY APPARATUS, AND A...
- Publication number 20150116688
- Publication date Apr 30, 2015
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF OBTAINING POSITION, EXPOSURE METHOD, AND METHOD OF MANUFA...
- Publication number 20150074621
- Publication date Mar 12, 2015
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130329207
- Publication date Dec 12, 2013
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING DEVICE, LITHOGRAPHY APPARATUS USING SAME, AND DEV...
- Publication number 20130258309
- Publication date Oct 3, 2013
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING DEVICE, LITHOGRAPHY APPARATUS USING SAME, AND DEV...
- Publication number 20110086298
- Publication date Apr 14, 2011
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Masatoshi Endo

Person

Patents Grantslast 30 patents

Exposure apparatus, method thereof, and method of manufacturing art...

Method of obtaining position, exposure method, and method of manufa...

Exposure apparatus and device manufacturing method

Measuring apparatus, measuring method, lithography apparatus, and a...

Substrate holding device, lithography apparatus using same, and dev...

Substrate holding device, lithography apparatus using same, and dev...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, METHOD THEREOF, AND METHOD OF MANUFACTURING ART...

MEASURING APPARATUS, MEASURING METHOD, LITHOGRAPHY APPARATUS, AND A...

METHOD OF OBTAINING POSITION, EXPOSURE METHOD, AND METHOD OF MANUFA...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

SUBSTRATE HOLDING DEVICE, LITHOGRAPHY APPARATUS USING SAME, AND DEV...

SUBSTRATE HOLDING DEVICE, LITHOGRAPHY APPARATUS USING SAME, AND DEV...