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Masatoshi Ikeda
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Projection exposure apparatus and method
Patent number
6,639,732
Issue date
Oct 28, 2003
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Support structure for a projection exposure apparatus and projectio...
Patent number
6,529,264
Issue date
Mar 4, 2003
Nikon Corporation
Masatoshi Ikeda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus and method
Patent number
6,195,213
Issue date
Feb 27, 2001
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Holder for reflecting member and exposure apparatus having the same
Patent number
6,043,863
Issue date
Mar 28, 2000
Nikon Corporation
Masatoshi Ikeda
G02 - OPTICS
Information
Patent Grant
Exposure projection apparatus
Patent number
5,973,863
Issue date
Oct 26, 1999
Nikon Corporation
Masato Hatasawa
G02 - OPTICS
Information
Patent Grant
Projection optical unit and projection exposure apparatus comprisin...
Patent number
5,852,518
Issue date
Dec 22, 1998
Nikon Corporation
Masato Hatasawa
G02 - OPTICS
Information
Patent Grant
Projection type exposure apparatus and method with detachable and a...
Patent number
5,638,223
Issue date
Jun 10, 1997
Nikon Corporation
Masatoshi Ikeda
G02 - OPTICS
Information
Patent Grant
Apparatus for holding a lens barrel for providing accurate lens adj...
Patent number
5,576,895
Issue date
Nov 19, 1996
Nikon Corporation
Masatoshi Ikeda
G02 - OPTICS
Information
Patent Grant
Exposure apparatus
Patent number
5,559,584
Issue date
Sep 24, 1996
Nikon Corporation
Akira Miyaji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Projection exposure apparatus and method
Publication number
20030137749
Publication date
Jul 24, 2003
NIKON CORPORATION
Yasuhiro Omura
G02 - OPTICS