Masatoshi Kanamaru

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Inashiki-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Deflector array, exposure apparatus, and device manufacturing method
- Patent number 8,143,588
- Issue date Mar 27, 2012
- Canon Kabushiki Kaisha
- Kenichi Nagae
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Deflector array, exposure apparatus, and device manufacturing method
- Patent number 7,795,597
- Issue date Sep 14, 2010
- Canon Kabushiki Kaisha
- Kenichi Nagae
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Deflector Array, Exposure Apparatus, and Device Manufacturing Method
- Publication number 20100248166
- Publication date Sep 30, 2010
- Canon Kabushiki Kaisha
- Kenichi Nagae
- B82 - NANO-TECHNOLOGY
Information Patent Application
DEFLECTOR ARRAY, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20080017807
- Publication date Jan 24, 2008
- Canon Kabushiki Kaisha
- Kenichi Nagae
- B82 - NANO-TECHNOLOGY