Masatoshi KASAHARA

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Koshi-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,170,209
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Takashi Yabuta
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,869,777
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Fumihiro Kamimura
- B08 - CLEANING
Information Patent Grant
Process liquid changing method and substrate processing apparatus
- Patent number 9,278,768
- Issue date Mar 8, 2016
- Tokyo Electron Limited
- Masatoshi Kasahara
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING LIQUID SUPPLY SYSTEM AND OPERATION METHOD THEREOF
- Publication number 20240234169
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Masatoshi KASAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID SUPPLY SYSTEM AND OPERATION METHOD THEREOF
- Publication number 20240136204
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Masatoshi KASAHARA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240096654
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Fumihiro KAMIMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220037167
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Takashi YABUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210098271
- Publication date Apr 1, 2021
- TOKYO ELECTRON LIMITED
- Fumihiro KAMIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS LIQUID CHANGING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20130220478
- Publication date Aug 29, 2013
- TOKYO ELECTRON LIMITED
- Masatoshi KASAHARA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL