Masatoshi Kitano

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and control method thereof
- Patent number 8,048,327
- Issue date Nov 1, 2011
- Tokyo Electron Limited
- Akira Koshiishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20080135519
- Publication date Jun 12, 2008
- TOKYO ELECTRON LIMITED
- Akira Koshiishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma processing apparatus and control method thereof
- Publication number 20040226815
- Publication date Nov 18, 2004
- TOKYO ELECTRON LIMITED
- Akira Koshiishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR