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SUBSTRATE TRANSFER DEVICE
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Publication number 20240383127
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Publication date Nov 21, 2024
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NISSIN ION EQUIPMENT CO., LTD.
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Masatoshi ONODA
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H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE HOLDING DEVICE
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Publication number 20230140269
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Publication date May 4, 2023
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NISSIN ION EQUIPMENT CO., LTD.
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Yusuke Otsuki
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H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE COOLING DEVICE
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Publication number 20210305072
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Publication date Sep 30, 2021
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NISSIN ION EQUIPMENT CO., LTD.
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Masatoshi ONODA
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE HEATING DEVICE
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Publication number 20200413493
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Publication date Dec 31, 2020
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NISSIN ION EQUIPMENT CO., LTD.
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Masatoshi ONODA
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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SUBSTRATE ACCOMMODATION DEVICE
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Publication number 20200286763
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Publication date Sep 10, 2020
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NISSIN ION EQUIPMENT CO., LTD.
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Koyu Ueno
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H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE HOLDING DEVICE
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Publication number 20200211891
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Publication date Jul 2, 2020
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NISSIN ION EQUIPMENT CO., LTD.
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Ippei NISHIMURA
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H01 - BASIC ELECTRIC ELEMENTS
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ION IMPLANTER
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Publication number 20100314552
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Publication date Dec 16, 2010
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NISSIN ION EQUIPMENT CO., LTD.
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Junichi Tatemichi
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H01 - BASIC ELECTRIC ELEMENTS
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PLASMA GENERATING DEVICE
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Publication number 20070266947
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Publication date Nov 22, 2007
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NISSIN ELECTRIC CO., LTD.
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Masatoshi Onoda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Silicon film forming apparatus
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Publication number 20070007128
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Publication date Jan 11, 2007
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NISSIN ELECTRIC CO., LTD.
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Atsushi Tomyo
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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