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Masatoshi Sato
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Chiba, JP
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last 30 patents
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Patent Grant
Winding type plasma CVD apparatus
Patent number
7,896,968
Issue date
Mar 1, 2011
ULVAC, Inc.
Takayoshi Hirono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Winding Type Plasma Cvd Apparatus
Publication number
20080006206
Publication date
Jan 10, 2008
Takayoshi Hirono
B08 - CLEANING