Masatsugu MAKABE

Follow

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method and substrate processing apparatus
- Patent number 11,810,792
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Takanori Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method
- Patent number 8,896,210
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Masaru Nishino
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220084836
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Takanori ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200243355
- Publication date Jul 30, 2020
- TOKYO ELECTRON LIMITED
- Masatsugu Makabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20130162142
- Publication date Jun 27, 2013
- TOCALO CO., LTD.
- Masaru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS