Masaya Asai

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film processing method
- Patent number 12,119,242
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, film formation unit, substrate proc...
- Patent number 11,986,853
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Exposure device
- Patent number 11,281,108
- Issue date Mar 22, 2022
- SCREEN Holdings Co., Ltd.
- You Arisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,243,469
- Issue date Feb 8, 2022
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film processing unit and substrate processing apparatus
- Patent number 11,004,702
- Issue date May 11, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method an...
- Patent number 10,955,745
- Issue date Mar 23, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating method
- Patent number 10,941,492
- Issue date Mar 9, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and apparatus used therefor
- Patent number 10,900,126
- Issue date Jan 26, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film processing unit, substrate processing apparatus and substrate...
- Patent number 10,854,480
- Issue date Dec 1, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thermal processing device, substrate processing apparatus, thermal...
- Patent number 10,832,925
- Issue date Nov 10, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Development unit, substrate processing apparatus, development metho...
- Patent number 10,754,251
- Issue date Aug 25, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,591,820
- Issue date Mar 17, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method
- Patent number 10,539,877
- Issue date Jan 21, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device substrate processing apparatus, exposure method of...
- Patent number 10,444,636
- Issue date Oct 15, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method of...
- Patent number 10,401,736
- Issue date Sep 3, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching device, substrate processing apparatus, etching method and...
- Patent number 10,395,942
- Issue date Aug 27, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,331,034
- Issue date Jun 25, 2019
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Atmosphere concentration monitoring for substrate processing appara...
- Patent number 6,053,058
- Issue date Apr 25, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Toyohide Hayashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM PROCESSING METHOD
- Publication number 20210233784
- Publication date Jul 29, 2021
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE
- Publication number 20210088911
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- You Arisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...
- Publication number 20210078036
- Publication date Mar 18, 2021
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD
- Publication number 20190294049
- Publication date Sep 26, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190196335
- Publication date Jun 27, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...
- Publication number 20190086808
- Publication date Mar 21, 2019
- SCREEN Holdings Co., Ltd.
- Chisayo NAKAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190041754
- Publication date Feb 7, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPMENT UNIT, SUBSTRATE PROCESSING APPARATUS, DEVELOPMENT METHO...
- Publication number 20190041755
- Publication date Feb 7, 2019
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190004427
- Publication date Jan 3, 2019
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE...
- Publication number 20180315623
- Publication date Nov 1, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180315625
- Publication date Nov 1, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253012
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253011
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20180230598
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20180230599
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...
- Publication number 20180147599
- Publication date May 31, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING DEVICE, SUBSTRATE PROCESSING APPARATUS, ETCHING METHOD AND...
- Publication number 20180076056
- Publication date Mar 15, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, THERMAL...
- Publication number 20180050368
- Publication date Feb 22, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Masaya Asai

Person

Patents Grantslast 30 patents

Film processing method

Substrate processing apparatus, film formation unit, substrate proc...

Exposure device

Substrate processing apparatus and substrate processing method

Film processing unit and substrate processing apparatus

Exposure device, substrate processing apparatus, exposure method an...

Substrate treating method

Substrate treating method and apparatus used therefor

Film processing unit, substrate processing apparatus and substrate...

Thermal processing device, substrate processing apparatus, thermal...

Development unit, substrate processing apparatus, development metho...

Substrate processing apparatus and substrate processing method

Developing method

Exposure device substrate processing apparatus, exposure method of...

Exposure device, substrate processing apparatus, exposure method of...

Etching device, substrate processing apparatus, etching method and...

Substrate processing apparatus and substrate processing method

Atmosphere concentration monitoring for substrate processing appara...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

FILM PROCESSING METHOD

EXPOSURE DEVICE

SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...

DEVELOPING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPMENT UNIT, SUBSTRATE PROCESSING APPARATUS, DEVELOPMENT METHO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE...

FILM PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

SUBSTRATE TREATING METHOD

SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...

ETCHING DEVICE, SUBSTRATE PROCESSING APPARATUS, ETCHING METHOD AND...

THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, THERMAL...