Masaya Iwasaki

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,397,534
- Issue date Jul 8, 2008
- Nikon Corporation
- Naohiko Iwata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus
- Patent number 6,961,113
- Issue date Nov 1, 2005
- Nikon Corporation
- Yutaka Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and manufacturing and adjusting metho...
- Patent number 6,621,556
- Issue date Sep 16, 2003
- Nikon Corporation
- Masaya Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring position of pattern formed on a...
- Patent number 5,671,054
- Issue date Sep 23, 1997
- Nikon Corporation
- Masaya Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Stage Apparatus and Exposure Apparatus
- Publication number 20080239257
- Publication date Oct 2, 2008
- Shigeru Hagiwara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060077368
- Publication date Apr 13, 2006
- Nikon Corporation
- Naohiko Iwata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus and manufacturing and adjusting metho...
- Publication number 20020030799
- Publication date Mar 14, 2002
- Masaya Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY