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Masaya Kawamata
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Miyagi, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
9,887,109
Issue date
Feb 6, 2018
Tokyo Electron Limited
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing target object and plasma processing apparatus
Patent number
9,583,361
Issue date
Feb 28, 2017
Tokyo Electron Limited
Yoshihide Kihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Plasma processing method
Patent number
9,502,219
Issue date
Nov 22, 2016
Tokyo Electron Limited
Yoshihide Kihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
9,460,893
Issue date
Oct 4, 2016
Tokyo Electron Limited
Masaya Kawamata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
9,349,619
Issue date
May 24, 2016
Tokyo Electron Limited
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
9,202,707
Issue date
Dec 1, 2015
Tokyo Electron Limited
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20160099161
Publication date
Apr 7, 2016
TOKYO ELECTRON LIMITED
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20150262794
Publication date
Sep 17, 2015
TOKYO ELECTRON LIMITED
Yoshihide Kihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING TARGET OBJECT AND PLASMA PROCESSING APPARATUS
Publication number
20150243524
Publication date
Aug 27, 2015
TOKYO ELECTRON LIMITED
Yoshihide Kihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20140363980
Publication date
Dec 11, 2014
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20140193977
Publication date
Jul 10, 2014
TOKYO ELECTRON LIMITED
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20130237053
Publication date
Sep 12, 2013
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20130014895
Publication date
Jan 17, 2013
TOKYO ELECTRON LIMITED
Masaya Kawamata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...