Masaya ODAGIRI

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate stage, substrate processing apparatus and substrate proce...
- Patent number 9,153,465
- Issue date Oct 6, 2015
- Tokyo Electron Limited
- Masaya Odagiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,968,475
- Issue date Mar 3, 2015
- Tokyo Electron Limited
- Masaya Odagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,741,065
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Masaya Odagiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for performing a chemical oxide removal process
- Patent number 8,175,736
- Issue date May 8, 2012
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180112312
- Publication date Apr 26, 2018
- TOKYO ELECTRON LIMITED
- Masaya ODAGIRI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150113826
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Masaya Odagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20120180883
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Masaya ODAGIRI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STAGE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCE...
- Publication number 20120000612
- Publication date Jan 5, 2012
- TOKYO ELECTRON LIMITED
- Masaya ODAGIRI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20120000629
- Publication date Jan 5, 2012
- TOKYO ELECTRON LIMITED
- Masaya ODAGIRI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR PERFORMING A CHEMICAL OXIDE REMOVAL PROCESS
- Publication number 20110307089
- Publication date Dec 15, 2011
- TOKYO ELECTRON LIMITED
- Masayuki TOMOYASU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Masaya ODAGIRI

Person

Patents Grantslast 30 patents

Substrate stage, substrate processing apparatus and substrate proce...

Substrate processing apparatus

Substrate processing apparatus

Method and system for performing a chemical oxide removal process

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND FILM FORMING METHOD

SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE STAGE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCE...

SUBSTRATE PROCESSING APPARATUS

METHOD AND SYSTEM FOR PERFORMING A CHEMICAL OXIDE REMOVAL PROCESS