Masaya YASUKOCHI

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck mechanism and charged particle beam apparatus
- Patent number 9,401,297
- Issue date Jul 26, 2016
- Hitachi High-Technologies Corporation
- Yasushi Ebizuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic Chuck Mechanism and Charged Particle Beam Apparatus
- Publication number 20150262857
- Publication date Sep 17, 2015
- Hitachi High-Technologies Corporation
- Yasushi EBIZUKA
- H01 - BASIC ELECTRIC ELEMENTS