Masayasu Hirata

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Chigasaki-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
Plasma film-forming apparatus and cleaning method for the same
- Publication number 20040007247
- Publication date Jan 15, 2004
- ULVAC, Inc.
- Shin Asari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma film-forming apparatus and cleaning method for the same
- Publication number 20020124866
- Publication date Sep 12, 2002
- ULVAC, Inc.
- Shin Asari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...