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Masayoshi Danbata
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Tokyo, JP
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last 30 patents
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Patent Grant
Method of exposing a semiconductor wafer and exposure apparatus
Patent number
8,558,990
Issue date
Oct 15, 2013
Elpida Memory, Inc.
Masayoshi Danbata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor device evaluation method and apparatus using the same
Patent number
7,495,457
Issue date
Feb 24, 2009
Elpida Memory, Inc.
Masayoshi Danbata
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method of exposing a semiconductor wafer and exposure apparatus
Publication number
20110279798
Publication date
Nov 17, 2011
Elpida Memory, Inc.
Masayoshi Danbata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR DEVICE EVALUATION METHOD AND APPARATUS USING THE SAME
Publication number
20080218193
Publication date
Sep 11, 2008
Elpida Memory, Inc.
Masayoshi Danbata
G01 - MEASURING TESTING