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Polishing apparatus
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Patent number RE38878
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Issue date Nov 15, 2005
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Ebara Corporation
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Masayoshi Hirose
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451 - Abrading
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Polishing apparatus
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Patent number RE38228
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Issue date Aug 19, 2003
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Ebara Corporation
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Masayoshi Hirose
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451 - Abrading
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Polishing apparatus
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Patent number 5,716,264
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Issue date Feb 10, 1998
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Ebara Corporation
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Norio Kimura
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 5,616,063
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Issue date Apr 1, 1997
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Kabushiki Kaisya Toshiba
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Katsuya Okumura
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B08 - CLEANING
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Polishing apparatus
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Patent number 5,476,414
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Issue date Dec 19, 1995
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Ebara Corporation
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Masayoshi Hirose
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 5,384,986
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Issue date Jan 31, 1995
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Ebara Corporation
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Masayoshi Hirose
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B24 - GRINDING POLISHING