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Masayoshi Naito
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Sendai, JP
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last 30 patents
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Patent Grant
Apparatus for exposing peripheral portion of substrate
Patent number
5,420,663
Issue date
May 30, 1995
Nikon Corporation
Masao Nakajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Periphery exposing method and apparatus therefor
Patent number
5,361,121
Issue date
Nov 1, 1994
Nikon Corporation
Ken Hattori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for exposing peripheral portion of substrate
Patent number
5,229,811
Issue date
Jul 20, 1993
Nikon Corporation
Ken Hattori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY