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Masayoshi Sekizawa
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Niigata, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing polishing pad, and method for polishing wafer
Patent number
8,287,331
Issue date
Oct 16, 2012
Shin-Etsu Handotai Co., Ltd.
Koichi Kanaya
B24 - GRINDING POLISHING
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Patent Grant
Method for producing semiconductor wafer and semiconductor wafer
Patent number
7,507,146
Issue date
Mar 24, 2009
Shin-Etsu Handotai Co., Ltd.
Tadahiro Kato
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Method for manufacturing polishing pad, polishing pad, and method f...
Publication number
20080248728
Publication date
Oct 9, 2008
Shin-Etsu Handotai Co., Ltd.
Koichi Kanaya
B24 - GRINDING POLISHING
Information
Patent Application
Method for Producing Semiconductor Wafer and Semiconductor Wafer
Publication number
20080096474
Publication date
Apr 24, 2008
SHIN-ETSU HANDOTAI CO., LTD.
Tadahiro Kato
B24 - GRINDING POLISHING