Masayoshi Shiga

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 7,665,415
- Issue date Feb 23, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhiro Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for performing photolithography
- Patent number 7,525,650
- Issue date Apr 28, 2009
- Dainippon Screen Mfg., Co., Ltd.
- Masayoshi Shiga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,790,286
- Issue date Sep 14, 2004
- Dainippon Screen Mfg. Co. Ltd.
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate inspection method and sub...
- Patent number 6,790,287
- Issue date Sep 14, 2004
- Dainippon Screen Mfg. Co. Ltd.
- Masayoshi Shiga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus
- Publication number 20060174832
- Publication date Aug 10, 2006
- DAINIPPON SCREEN MFG., CO., LTD.
- Kazuhiro Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, and combined system of functional b...
- Publication number 20050061247
- Publication date Mar 24, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Shuji Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus for performing photolithography
- Publication number 20050061242
- Publication date Mar 24, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Masayoshi Shiga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, substrate inspection method and sub...
- Publication number 20020189758
- Publication date Dec 19, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Masayoshi Shiga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20020092368
- Publication date Jul 18, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS