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Masayoshi Takeda
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Mito, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern inspection apparatus
Patent number
7,599,054
Issue date
Oct 6, 2009
Hitachi High-Technologies Corporation
Masayoshi Takeda
G01 - MEASURING TESTING
Information
Patent Grant
Circuit-pattern inspecting apparatus and method
Patent number
7,423,746
Issue date
Sep 9, 2008
Hitachi High-Technologies Corporation
Masayoshi Takeda
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection apparatus
Patent number
7,355,693
Issue date
Apr 8, 2008
Hitachi High-Technologies Corporation
Masayoshi Takeda
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam apparatus and automatic astigmatism adjustmen...
Patent number
7,348,558
Issue date
Mar 25, 2008
Hitachi, Ltd.
Masahiro Watanabe
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam apparatus and automatic astigmatism adjustmen...
Patent number
7,030,394
Issue date
Apr 18, 2006
Hitachi, Ltd.
Masahiro Watanabe
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam apparatus and automatic astigmatism adjustmen...
Patent number
6,825,480
Issue date
Nov 30, 2004
Hitachi, Ltd.
Masahiro Watanabe
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
CIRCUIT-PATTERN INSPECTING APPARATUS AND METHOD
Publication number
20080317330
Publication date
Dec 25, 2008
Hitachi High-Technologies Corporation
Masayoshi TAKEDA
G01 - MEASURING TESTING
Information
Patent Application
Pattern inspection apparatus
Publication number
20080162065
Publication date
Jul 3, 2008
HITACHI HIGH-TECNOLOGIES CORPORATION
Masayoshi Takeda
G01 - MEASURING TESTING
Information
Patent Application
Circuit-pattern inspecting apparatus and method
Publication number
20070201018
Publication date
Aug 30, 2007
Masayoshi Takeda
G01 - MEASURING TESTING
Information
Patent Application
Charged particle beam apparatus and automatic astigmatism adjustmen...
Publication number
20060289751
Publication date
Dec 28, 2006
Hitachi, Ltd
Masahiro Watanabe
G01 - MEASURING TESTING
Information
Patent Application
Focus correction method for inspection of circuit patterns
Publication number
20060284088
Publication date
Dec 21, 2006
Fumihiko Fukunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pattern inspection apparatus
Publication number
20060133661
Publication date
Jun 22, 2006
Hitachi High-Technologies Corporation
Masayoshi Takeda
G01 - MEASURING TESTING
Information
Patent Application
Charged-particle beam apparatus and method for automatically correc...
Publication number
20060060781
Publication date
Mar 23, 2006
Masahiro Watanabe
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged particle beam apparatus and automatic astigmatism adjustmen...
Publication number
20050092930
Publication date
May 5, 2005
Hitachi, Ltd. Incorporation
Masahiro Watanabe
G01 - MEASURING TESTING
Information
Patent Application
Charged-particle beam apparatus and method for automatically correc...
Publication number
20030006371
Publication date
Jan 9, 2003
Masahiro Watanabe
H01 - BASIC ELECTRIC ELEMENTS