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Masayuki HASEGAWA

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  • Oshu-shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20170125282
    • Publication date May 4, 2017
    • TOKYO ELECTRON LIMITED
    • Takahito UMEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS
    • Publication number 20150345015
    • Publication date Dec 3, 2015
    • TOKYO ELECTRON LIMITED
    • Takashi CHIBA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SLIMMING METHOD OF CARBON-CONTAINING THIN FILM AND OXIDATION APPARATUS
    • Publication number 20120156888
    • Publication date Jun 21, 2012
    • TOKYO ELECTRON LIMITED
    • Jun SATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION APPARATUS
    • Publication number 20110281443
    • Publication date Nov 17, 2011
    • TOKYO ELECTRON LIMITED
    • Pao-Hwa CHOU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VERTICAL FILM FORMATION APPARATUS AND METHOD FOR USING SAME
    • Publication number 20110129618
    • Publication date Jun 2, 2011
    • TOKYO ELECTRON LIMITED
    • Masanobu MATSUNAGA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND APPARATUS
    • Publication number 20110129619
    • Publication date Jun 2, 2011
    • TOKYO ELECTRON LIMITED
    • Masanobu Matsunaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    BATCH CVD METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
    • Publication number 20110021033
    • Publication date Jan 27, 2011
    • TOKYO ELECTRON LIMITED
    • Toshiyuki Ikeuchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor processing apparatus and method
    • Publication number 20060134811
    • Publication date Jun 22, 2006
    • Daisuke Suzuki
    • H01 - BASIC ELECTRIC ELEMENTS